Speaker
Description
Superconducting–Insulating–Superconducting (SIS) multilayers offer a promising approach to surpass the accelerating gradients and quality factors of standard bulk-Nb SRF cavities†. Plasma-enhanced atomic layer deposition (PEALD) stands out as a key technique for the next-generation thin-film-based SRF cavities, providing conformal coatings on highly structured, three-dimensional substrates without shadowing effects and with sub-nm thickness precision. This poster contributes to thin-film SRF R&D through dedicated material studies. The results presented correspond to Nb–AlN–NbTiN multilayers grown by PEALD, focusing on the S–I and I–S interfaces. Depth-resolved X-ray photoelectron spectroscopy (XPS) and cross-sectional energy-dispersive X-ray spectroscopy (EDX) are employed to assess the film stoichiometry and detect any interdiffusion or deposition residues. Side effects induced by high-temperature post-deposition annealing–required to obtain high-Tc NbTiN‡–are systematically investigated. Lastly, complementary studies on Superconducting–Superconducting (SS) Nb–NbTiN bilayers–grown without the AlN interlayer–underscore the crucial role of AlN as an effective diffusion barrier.
Footnotes
†A. Gurevich, “Enhancement of rf breakdown field of superconductors by multilayer coating”, Applied Physics Letters 88, 12511 (2006)
‡I. González Díaz-Palacio, M.Wenskat, G. K. Deyu, W. Hillert, R. H. Blick, and R. Zierold, “Thermal annealing of superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition”, Journal of Applied Physics 134, 035301 (2023)
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