Speaker
Vadim Dudnikov
(Muons, Inc)
Description
We will propose a novel high resolution method for surface scanning. Optical glow discharge spectroscopy (OGDS) devices are simpler and less expensive than secondary-ion mass spectrometry (SIMS),and can provide excellent spatial resolution. A small change in the design of the discharge device makes it possible to localize sputtering on a small portion of the target and to obtain the distribution of elements over the surface of the sample with micron resolution.
Funding Agency
DOE SBIR grant DE-SC0022577
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Primary author
Vadim Dudnikov
(Muons, Inc)
Co-author
Mary Anne Cummings
(Muons, Inc)
