Speaker
Description
An energy recovery linac (ERL) is an accelerator in which electron bunches are decelerated in the linac after generating radiation to recover their energy. Through this process, the ERL can achieve high energy efficiency while maintaining a high beam current. Due to these advantages, the ERL is an attractive candidate for a next-generation extreme ultraviolet (EUV) light source in lithography. EUV lithography is a critical procedure in the semiconductor fabrication process. Since an EUV-ERL can produce higher power than other conventional methods, it is more cost-efficient in terms of both construction and operation.
For efficient energy recovery, superconducting radio-frequency (SRF) cavities are used in the linac of the ERL. To design an SRF cavity, several factors and phenomena, such as peak electric and magnetic fields, higher-order mode (HOM) damping, and multipacting, should be considered simultaneously.
In this paper, we designed and optimized an L-band SRF cavity for an EUV-ERL. For the optimization of the cavity, machine learning was employed, utilizing the cavity dimensions as input parameters and the impedances of HOMs as the objectives.
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