Speaker
Description
Compact vacuum systems in Diffraction-limited Storage Rings (DLSRs) require Non-Evaporable Getter (NEG) films to sustain ultra-high vacuum (UHV) conditions. NEG films deployed for distributed pumping in UHV chambers deliver critical advantages for particle accelerators, including enhanced pumping efficiency, reduced residual pressures, minimized outgassing, and suppressed secondary electron emission. To meet HEPS ring specifications, a multi-channel magnetron sputtering system was developed for scalable NEG film deposition. The system utilizes movable solenoids to enable segmented coating of beam pipe interiors, achieving a total deposition length exceeding 30 meters (six segments, 5.2 m each) per operational cycle. TiZrV films were successfully deposited within a prototype vacuum chamber. Pumping speed evaluations using a custom testing system revealed that the activated TiZrV film (200°C) attained pumping rates of 0.68 L/s·cm² for H₂ and 2.36 L/s·cm² for CO.
Funding Agency
The National Natural Science Foundation of China (No. 12505184，12505183)
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