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Description
The Hefei Advanced Light Facility (HALF) is a fourth-generation synchrotron radiation light source based on diffraction-limited storage ring. NEG coated vacuum chambers provide an effective route for the acquisition of ultra-high vacuum in DLSRs. The vacuum performances of the NEG coated vacuum chamber greatly affect the long-term stability and reliability of vacuum systems. In this work, ternary Ti-Zr-V films were deposited on the interior surface of the small aperture copper vacuum chamber by DC magnetron sputtering. The vacuum performance of the NEG coated vacuum chambers subjected to nitrogen venting-activation cycles and neon venting-activation cycles are investigated, respectively. The pumping capacities of the NEG coated vacuum chambers were evaluated after storage in vacuum, nitrogen and neon atmospheres. Furthermore, the ultimate pressure of the NEG coated vacuum chamber activated by polyimide heaters was tested. This work provides data support for the application of NEG-coated vacuum chamber in the Hefei Advanced Light Facility.
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