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Description
This work investigates a GHz-repetition-rate burst-mode drive laser system for SSMB-EUV source injectors. A SESAM mode-locked oscillator with a repetition rate of 357 MHz serves as the seed, which is locked to an external reference via closed-loop feedback. The repetition rate is increased to 2856 MHz using a three-stage Mach-Zehnder structure. The laser pulses are then primarily chopped by an intensity modulator to reduce the average power, followed by amplification in a three-stage MOPA fiber amplifier unit to boost the single-pulse energy. The amplified pulses are selected by an electro-optic modulator to form a tunable-repetition-rate pulse train, which is subsequently injected into a solid-state amplifier for two-pass amplification. Finally, through cascaded frequency doubling with LBO and BBO crystals, the 1064 nm fundamental wave is converted to 266 nm ultraviolet output, while high-efficiency frequency-doubling crystals and dichroic mirrors are employed to effectively suppress the fundamental wave and other background light. The system incorporates beam-sampling monitors and PZT-based closed-loop feedback to achieve long-term active stabilization of the pulse repetition frequency. This study provides a key drive-laser technical solution for SSMB-EUV source.
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