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Description
In accelerators (4th-gen synchrotron radiation sources), charged particle collisions with residual gas in elongated vacuum chambers shortens beam lifetime. Depositing non-evaporable getter (NEG) coatings on chamber inner walls is optimal. However, traditional targets (TiZrV alloy targets) for inner-tube NEG deposition have flaws: complex processing, high costs, poor component adjustability, restricting process adaptability and performance optimization. To address this, this study proposes replacing TiZrV alloy targets with a tandem composite of elemental targets. An experimental system via magnetron sputtering was built; comparative experiments explored coating performance among twisted wire targets, traditional alloy targets, and tandem composite targets. NEG coatings were core, with effects verified by characterizing microstructure, pumping performance, activation temperature. Results show tandem composite-prepared NEG coatings match traditional alloy ones: comparable pumping performance, lower activation temperature (aiding rapid vacuum start-up). Adjusting elemental proportion enables flexible doping (e.g., specific Cu doping optimizes conductivity but weakens vacuum performance moderately). Tandem composite coatings outperform single elemental target ones in stability. This study provides a cost-effective, flexible target solution for accelerator NEG deposition, offers a new path for high-performance doped coating optimization.
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