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Description
Thin titanium coatings were deposited on alumina RF windows at CERN to reduce the secondary electron emission yield. The deposition process was optimized to ensure uniform coverage of the components used in high-power RF systems. Witness samples were characterized to assess their suitability for accelerator applications. Surface resistivity was measured under controlled conditions, while the Secondary Electron Yield was evaluated to determine the effectiveness of the coating in reducing electron emission. Thickness uniformity was characterized through detailed mapping using Rutherford Backscattering Spectrometry at the Laboratori Nazionali di Legnaro, providing spatially resolved information on deposition homogeneity and confirming process reproducibility. These results provide a comprehensive overview of the properties of the titanium coatings and serve as a useful reference for optimizing surface treatments of RF windows in accelerator facilities.
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