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This paper explores a new technique for testing the RF resistivity of Non-Evaporable Getter (NEG) thin films. The technique can be applied to tubular samples, which are representative of the beamlines that would be coated within accelerators, and can also be used for pumping property measurements, so a full analysis of NEG coating properties can be made, and a NEG composition with best compromise between resistivity and pumping can be found. The technique allows measurement of RF surface resistance at 0.3-4.6 GHz.
The method was used on uncoated samples of stainless steel and Cu, to demonstrate a clear difference in measured surface resistance, and samples coated with single element Ti NEG. Samples were coated with approximately 3μm thickness, with the columnar NEG coating showing no difference in surface resistance, and dense NEG coating showing a variation in surface resistance from the copper substrate.
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