IPAC'26 - the 17th International Particle Accelerator Conference

EUV for lithography production using accelerators

20 May 2026, 09:00

30m

C.I.D

Invited Oral Presentation MC8.A28: Applications: Industrial Accelerators MC8 : Applications of Accelerators, Engagement with Industry, Technology Transfer and Outreach

Speaker

Daniel Ratner (SLAC National Accelerator Laboratory)

Description

This talk gives an overview of the ongoing developments to produce EUV for lithography