19–24 May 2024
Music City Center
US/Central timezone

An industrial light source for semiconductor manufacturing

TUVD1
21 May 2024, 15:00
20m
Davidson Ballroom (Music City Center)

Davidson Ballroom

Music City Center

201 Rep. John Lewis Way S, Nashville, TN 37203, USA
Invited Oral Presentation Industry Session 2

Speaker

Bruce Dunham (xLight Incorporated)

Description

Light drives innovation – the wavelength, the power, the intrinsic qualities. From the mask shop to the packaging fab, from lithography to metrology, each technology node has relied on light invention to enable scaling, process control, reliability, and even ensuring supply chain security. However, the increasing cost and complexity of new light sources to meet industry demands has become prohibitive, leading to stagnation in technology development and reliance on the status quo in terms of the light available and the applications it permits. Now, a leap is required to develop the new generation of light source that will serve the semiconductor industry indefinitely, providing low-cost EUV as well as any wavelength required for manufacturing or R&D applications. xLight is building an accelerator-based light source to drive the semiconductor industry into the next decade and beyond, providing high power, quality light to any application and delivering light as a utility.

Region represented North America

Primary author

Bruce Dunham (xLight Incorporated)

Presentation materials

There are no materials yet.