Speaker
Description
The non-evaporable getter (NEG) coatings provide not only conductance-free evenly distributed pumping and low thermal outgassing rates but also photon-and electron-stimulated desorption and second electron yield. NEG coatings are considered pivotal for attain-ing ultrahigh vacuum in fourth-generation diffraction storage ring vacuum systems. TiZrV thin films were deposited onto elongated CuCrZr pipes for this inves-tigation. The influence of various deposition parame-ters on the NEG coatings was investigated. The micro-structure, surface topography, roughness, and phase composition were evaluated using Scanning Electron Microscopy, Energy Dispersive Spectroscopy, X-ray Diffraction, and Atomic Force Microscope, respective-ly. Additionally, the activation performance of the TiZrV films was investigated in relation to deposition parameters.
| Region represented | Asia |
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| Paper preparation format | Word |
