Speaker
Description
The 288m long SLS 2.0 Storage Ring consists of several vacuum chambers with unique geometries. Complicated features, with many changes in the cross sections, are essential to provide the best impedance matching and to allow synchrotron light extraction under the tight geometrical constraints. In order to speed up the commissioning time, it was decided to NEG coat most of the vacuum chambers. A new magnetron sputtering setup has been developed in Paul Scherrer Institute, where the plasma length, defined by thin solenoids, is relatively small. The solenoids are then travelling over the entire vacuum chambers more than ten times per coating process to assure best possible thickness uniformity. Flexibility provided by this solution allows to coat various vacuum vessels in one assembly. This paper will describe this NEG coating setup and show results on SLS 2.0 vacuum chambers.
| I have read and accept the Privacy Policy Statement | Yes |
|---|
