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To generate high-current B+ ion beams for ion implantation, a hybrid ion source that combines electron cyclotron resonance and thermal surface ionization, which is called a high-temperature surface microwave source (HSMS), is under development. A high-temperature hot surface (2000℃) and microwave heating are the essential components of an HSMS to produce high-energy electrons for the B+ generation. A helical tungsten filament will be used in the HSMS source to obtain a high temperature and provide an axial configuration with a magnetic field of approximately 875 Gs for the 2.45-GHz electron cyclotron resonance. The mixing ionization of high-temperature surface ionization and ECR ionization is a very complex ionization process. To understand the influence of the two ionization modes on plasma, this paper proposes a plasma model to simulate the mixing processes of the two ionizations. The effects of high-temperature surface ionization and ECR ionization were separately evaluated. The magnetic field configuration, microwave power, and air pressure have been studied through this plasma model.
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