Speaker
Description
New high-resolution X-ray beamlines demand reflective optics with higher surface profile accuracy to achieve diffraction-limited focusing. This necessitates advanced metrology instruments capable of delivering repeatable measurements in the nanometer to sub-nanometer range. Slope ranges exceeding 15 mrad (0.86°) and greater pose significant challenges for mirror metrology using conventional interferometric methods especially on shorter mirrors with low radius of curvature (<20 m). To address this, we present a new Relative Angle Determinable Stitching Interferometry (RADSI) instrument featuring a parallel flexure-based mechanical design. This approach enhances vibration and thermal stability while maintaining a compact and lightweight system. Initial measurements of a cylindrical mirror with a 16 m radius of curvature and a slope range of 5 mrad demonstrate nanometer-level repeatability. Comprehensive system characterization suggests the potential for achieving sub-nanometer repeatability with further refinement to the instrument.
Funding Agency
U.S. Department of Energy (DOE) Office of Science User Facility operated for the DOE Office of Science by Brookhaven National Laboratory under Contract No. DE-SC0012704
