Improving of sputtered titanium film for NIK ceramic chamber in TPS

WEP32
17 Sept 2025, 17:00
1h
Poster Session Room (The Loop)

Poster Session Room

The Loop

Poster Presentation Storage Rings Wednesday Poster Session

Speaker

Chun-Shien Huang (National Synchrotron Radiation Research Center)

Description

The development of the Nonlinear In-vacuum Kicker (NIK) is one of the key projects of the Taiwan Photon Source (TPS). Efficient conduction of the image current generated by the stored beam requires the deposition of a highly conductive titanium thin film on the inner surface of the NIK ceramic chamber. Based on tests involving the sputtering of a 5.5 μm titanium film onto a 34 cm × 6 cm ceramic substrate, the uniformity of the titanium film was controlled within 5%. The adhesion strength between the titanium film and the ceramic substrate reached 60 MPa, and the electrical resistivity was measured at 7.2 × 10⁻⁵ Ω·cm. This paper presents a detailed overview of the coating system, experimental methodology, and test results.

Author

Chun-Shien Huang (National Synchrotron Radiation Research Center)

Co-authors

Bo-Ying Chen (National Synchrotron Radiation Research Center) Chien-Kuang Kuan (National Synchrotron Radiation Research Center) Tse-Chuan Tseng (National Synchrotron Radiation Research Center) Yi-Chih Liu (National Synchrotron Radiation Research Center)

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