Speaker
Description
Coupled with faster detectors, X-ray optic upgrades, new flagship beamlines, and advanced data pipelines, the new low emittance Diamond-II source will benefit a wide range of scientific communities. Smaller, brighter, X-ray beams enable sample scanning systems to progress from slow, step-based motion to rapid, freeform dynamic trajectories. Metrology feedback devices, such as interferometers or capacitive displacement sensors, are increasingly used for real-time monitoring and correction of parasitic errors of micro- and nano-positioning stages [*]. Beamlines are often noisy environments, with mechanical, acoustic and electrical disturbances, and temperature or humidity fluctuations. To provide accurate, closed-loop feedback for nano-positioning stages, metrology instruments need to be calibrated and optimised to nullify errors caused by variations on the beamline [**]. We demonstrate the importance of characterising a nano-positioning stage in the ultra-stable environment of the Precision Metrology Lab using a traceable, linear interferometer. Lessons learnt are applied to compensate for environmental changes in “real-world” beamline conditions to achieve sub-nm nano-positioning.
Footnotes
[] S.G Alcock et al, “Generating and measuring pico-radian angles”, Metrologia 59, 6, 064002, 2022. Doi: 10.1088/1681-7575/ac9736
[*] A. Yacoot and M.J. Downs, “The use of x-ray interferometry to investigate the linearity of the NPL Differential Plane Mirror Optical Interferometer,” Meas. Sci. Technol. 11, 1126–1130, 2000. Doi: 10.1088/0957-0233/11/8/305
Funding Agency
Diamond Light Source Ltd
