A laser tracking system for sample positioning

THO14
18 Sept 2025, 15:20
20m
The Loop

The Loop

Lund, Sweden
Contributed Oral Presentation Nano-positioning Precision Mechanics

Speaker

François Villar (European Synchrotron Radiation Facility)

Description

In the frame of the LEAPS-Innov pilot project, the ESRF together with ALBA, Soleil, PTB and HZB have developed a position measuring system based on fibered laser interferometers and beam steering mirrors that track the position of the object to be measured thanks to a closed loop control system. The global objective is to measure the position of objects moving in a plane along 3 degrees of freedom (2 translations and one rotation), with a typical range of a few millimeters and a few tens of degrees and with a repeatability of 10 nanometers. This system could typically be used for measuring sample position in experimental stations. The project was divided in 2 parts, the first one being dedicated to the characterization of periodic non linearities of commercially available fibered interferometers by all project partners and continued with the design and construction of a 3 axes prototype system at ESRF. I will present the results of the interferometers characterization, the design of the mechanical, optical and control systems used to implement this prototype and the experimental results obtained.

Funding Agency

This project has received funding from the European Union´s Horizon 2020 research and innovation programme under grant agreement no. 101004728.

Author

François Villar (European Synchrotron Radiation Facility)

Co-authors

Thomas Dehaeze (European Synchrotron Radiation Facility) Jose Maria Clement (European Synchrotron Radiation Facility) Pierrick Got (European Synchrotron Radiation Facility) Julien Bonnefoy (European Synchrotron Radiation Facility) Juan Luis Frieiro (ALBA Synchrotron (Spain)) Sébastien Ducourtieux (Synchrotron soleil) Jens Fluegge (Physikalisch-Technische Bundesanstalt) Klaus Kiefer (Helmholtz-Zentrum Berlin für Materialien und Energie) Daniel Fiole (European Synchrotron Radiation Facility)

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