Speaker
Description
There is an increasing demand for coherent extreme ultraviolet (EUV) radiation in imaging and spectroscopy, particularly as the next generation of EUV lithography requires high-power EUV light sources. Experimental results demonstrate that harmonic lasing in a free-electron laser (FEL) is an effective method for extending the wavelength range and producing narrow bandwidth FEL. In this contribution, we propose operating the radiation segment in conventional echo-enabled harmonic generation at high harmonic mode instead of the fundamental radiation. This approach combines phase shifting and undulator tapering to generate high-power EUV radiation. The results indicate that fully coherent EUV radiation with an average power of up to 1 kW can be generated using a 280-MeV electron beam with an average current of 10 mA.
