1–6 Jun 2025
Taipei International Convention Center (TICC)
Asia/Taipei timezone

Pumping properties of Pd/Ti non-evaporable getter film

THPB076
5 Jun 2025, 15:30
2h
Exhibiton Hall A _Bear (TWTC)

Exhibiton Hall A _Bear

TWTC

Poster Presentation MC7.T14 Vacuum Technology Thursday Poster Session

Speaker

Tao Guo (University of Science and Technology of China)

Description

Non-evaporable getter (NEG) films are ideal for maintaining ultra-high vacuum (UHV) conditions in particle accelerators, owing to their uniform pumping speeds and negligible outgassing characteristics. However, the requirement for thermal activation limits the applicability of NEG films. Prolonged exposure to atmospheric conditions and repeated activation cycles lead to a gradual increase in their activation temperature. This poses significant challenges for accelerator maintenance. The Pd/Ti composite film, created by depositing a palladium (Pd) layer onto a titanium (Ti) film, enhances oxidation resistance and reduces activation temperatures. In this study, a double-layer Pd/Ti film was deposited onto oxygen-free copper (OFC) samples, and a specialized device for measuring its pumping speed was designed and constructed. Additionally, the microstructures, cross-sectional elemental distributions, surface elemental compositions, and pumping properties of the films were tested and analyzed.

Region represented Asia
Paper preparation format Word

Author

Tao Guo (University of Science and Technology of China)

Co-authors

Le Fan (University of Science and Technology of China) Sihui Wang (University of Science and Technology of China) Wenjing Ma (University of Science and Technology of China) Xiaopeng Xu (University of Science and Technology of China) Xinyu Jin (University of Science and Technology of China) XueSong Zhou (University of Science and Technology of China) Yuanzhi Hong (University of Science and Technology of China)

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