Speaker
Description
Residual Gas Analyzers (RGA) are highly sensitive gas detectors. In the semiconductor industry, RGA has been used to analyze gas components in the manufacturing process. It is an extremely versatile measurement and analysis tool. The RGA is mostly used to measure the cleanliness of ultra-high vacuum systems and helium leakage measurements at NSRRC. If you need to measure in a low vacuum environment, RGA needs to be equipped with differential pumping technology. A simple and modular differential air extraction system has been established so that RGA can monitor vacuum systems up to 10 Torr. At present, this system has been tried to measure the UV/Ozone cleaning system and monitor the changes in various gas components during the carbon removal process of this system. Since this differential air extraction system adopts a modular design, the system can be expanded to a higher working pressure simply by connecting.
| Region represented | Asia |
|---|---|
| Paper preparation format | Word |
