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Description
Electron Cyclotron Resonance Ion Sources (ECRIS) are devices capable to provide a constant flow of ions at high currents. The ions extracted from the ECRIS can be used in material doping applications. In this paper, we present the design of an ECRIS magnetic system for graphene doping. The design is based in the use of Cable-In-Conduit superconducting cable and a superferric sextupole. This magnetic system allows a simpler design, the use of less amount of superconducting cable, and the ability to variate the magnetic field strength to tune it according to the specific doping application or to the microwave frequency employed for electron heating. The results of numerical simulations show that this system generates a magnetic field in the B-minimum configuration with a maximum strength of 1.0 T near the gas injection side and a sextupolar field in the middle of the plasma chamber with a maximum of 0.8 T in the wall. The system can be adjusted to be used with microwaves in the frequency range 1–10 GHz. Simulations of nitrogen plasma generation and confinement show that an ECRIS with this magnetic system allows electron and N^+ ion densities of at least 9.6E18 m^−3 in the center of the plasma chamber for 10 GHz microwaves at 1 KW and a nitrogen gas at a pressure of 1 Pa.
| Classification | MC8: Source modelling |
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